Location: F10N

Department: DIFFUSION/IMPLANT PROCESS and EQUIPMENT ENGINEERING

Diffusion Furnace Batch Load Size Increase Qualification To Achieve Max Out Impact

This project focuses on qualifying and expanding the volume of batches processed in a diffusion furnace. It ensures no negative impact on product quality, wafer yield, or manufacturing line performance. The work supports the department’s objective to maximize manufacturing output through process optimization. The study will analyze process gas flow behavior within the diffusion furnace, the influence of gas injectors on distribution and uniformity, and how temperature modulation across multiple furnace heating zones affects film deposition uniformity along the furnace boat. Findings will define and validate operating conditions that enable higher batch loading while maintaining process robustness.

• An...